TSI Incorporated 2940 FC3 Liquid Flow Controller 2940-01-1005

Precision control of an external Piezo valve with full scale (TEOS equivalent) of 6.4 g/min This thermal Liquid Flow Controller (LFC) is designed to work with the MSP ‘PE’ series Turbo-Vaporizers. The 2940 LFC is comprised of a thermal sensor to sense the mass flow rate of the liquid and generate a voltage to operate the piezoelectric control valve in the ‘PE’ series Turbo-Vaporizers. The 2940 features a fast response time making it a good choice for short duration vapor pulses frequently used in ALD or short pulse CVD. The 2940 features zoned ‘PID’ settings and a self-learning function for improved control. Model - 2940 Liquid Flow Controller FC3 Full Scale TEOS Equiv (g/min) 32 Full Scale DI Water (g/min) 5.0 Overpressure Resistance (bar) 1 Max Pressure Drop (mbar) 1 Capillary Inner Diameter (mm) 1.8 Power @ 24V (W) 48 Port Connectors 1/8 inch Male VCR Fitting Operating Temp (ºC) 0–50 Operating Humidity (%) 20–80 non-condensing Wetted Materials Quartz Glass/PEEK/SS316/Vit on/Silicon RTV Dimensions (mm/inches) 127 x 152 x 25 / 5 x 6 x 1 Weight (kg/lb) 0.45/1.0 Ambient Storage Temperature (ºC) -10–60 Mounting Slots Four slots 0.15 inches wide on a 4.75 inch x 0.75 inch pattern Communications Pinout Pin Function 1 +24V 2 Set-point (0–5V) 3 Monitor (0–5V) 4 RXD 5 TXD 6,7,8,9 Ground