TSI Incorporated Turbo-Vaporizer 2841PE 2841PE

Description
The 2841PE Turbo-Vaporizer™ was designed for high flow water vapor.  This model has the state-of-the art PE atomizer with on-board flow control, and dual heaters to combat evaporative cooling at high water flow rates. Dimensions 297 mm x 119 mm x 122 mm (11.7 in. x 4.7 in. x 4.8 in.) Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut Liquid Inlet 1/8 in. VCR female Vapor Outlet 1/4 in. VCR female Compressed Air 4 mm instant tube fitting Wetted Parts SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy® Leak Integrity <1 x 10-9 scc/sec Helium Heater Power Requirements 208 VAC, 60 Hz, 500W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 15 standard L/min Max. Liquid Flow* TEOS equivalent 3,000 g/hr Max. Liquid Flow* DI Water 300 g/hr System Pressure Limit 120 psig Compressed Air 90 to 110 psi Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid and gas type
Description
The 2841PE Turbo-Vaporizer™ was designed for high flow water vapor.  This model has the state-of-the art PE atomizer with on-board flow control, and dual heaters to combat evaporative cooling at high water flow rates. Dimensions 297 mm x 119 mm x 122 mm (11.7 in. x 4.7 in. x 4.8 in.) Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut Liquid Inlet 1/8 in. VCR female Vapor Outlet 1/4 in. VCR female Compressed Air 4 mm instant tube fitting Wetted Parts SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy® Leak Integrity <1 x 10-9 scc/sec Helium Heater Power Requirements 208 VAC, 60 Hz, 500W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 15 standard L/min Max. Liquid Flow* TEOS equivalent 3,000 g/hr Max. Liquid Flow* DI Water 300 g/hr System Pressure Limit 120 psig Compressed Air 90 to 110 psi Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid and gas type

Suppliers

Company
Product
Description
Supplier Links
Turbo-Vaporizer 2841PE - 2841PE - TSI Incorporated
Shoreview, MN, United States
Turbo-Vaporizer 2841PE
2841PE
Turbo-Vaporizer 2841PE 2841PE
The 2841PE Turbo-Vaporizer™ was designed for high flow water vapor.  This model has the state-of-the art PE atomizer with on-board flow control, and dual heaters to combat evaporative cooling at high water flow rates. Dimensions 297 mm x 119 mm x 122 mm (11.7 in. x 4.7 in. x 4.8 in.) Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut Liquid Inlet 1/8 in. VCR female Vapor Outlet 1/4 in. VCR female Compressed Air 4 mm instant tube fitting Wetted Parts SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy® Leak Integrity <1 x 10-9 scc/sec Helium Heater Power Requirements 208 VAC, 60 Hz, 500W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 15 standard L/min Max. Liquid Flow* TEOS equivalent 3,000 g/hr Max. Liquid Flow* DI Water 300 g/hr System Pressure Limit 120 psig Compressed Air 90 to 110 psi Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid and gas type

The 2841PE Turbo-Vaporizer™ was designed for high flow water vapor.  This model has the state-of-the art PE atomizer with on-board flow control, and dual heaters to combat evaporative cooling at high water flow rates.

Dimensions

297 mm x 119 mm x 122 mm (11.7 in. x 4.7 in. x 4.8 in.)


Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
Liquid Inlet 1/8 in. VCR female
Vapor Outlet 1/4 in. VCR female
Compressed Air 4 mm instant tube fitting
Wetted Parts SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy®
Leak Integrity <1 x 10-9 scc/sec Helium
Heater Power Requirements 208 VAC, 60 Hz, 500W
Carrier Gas Inert gas recommended
Gas Inlet Pressure Range 0–80 psig inlet pressure
Max. Carrier Gas Flow Rate* N2 15 standard L/min
Max. Liquid Flow* TEOS equivalent 3,000 g/hr
Max. Liquid Flow* DI Water 300 g/hr
System Pressure Limit 120 psig
Compressed Air 90 to 110 psi
Temperature Range 40°C to 200°C
Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction
Temperature Sensor Type K thermocouple

Specifications subject to change without notice
* Liquid and gas flow ranges are affected by liquid and gas type

Supplier's Site

Technical Specifications

  TSI Incorporated
Product Category MEMS Processing Equipment
Product Number 2841PE
Product Name Turbo-Vaporizer 2841PE
Process Chemical Vapor Deposition; Physical Vapor Deposition
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