TSI Incorporated Turbo-Vaporizer 2821 2821

Description
The 2821 Turbo-Vaporizer™ is our highest liquid flow rate unit.  This model features 3600W of heater power and can be used to deliver flow rates up to 6000g/hr (TEOS or equivalent). Dimensions 417 mm x 140 mm x 183 mm (16.4 in. x 5.5 in. x 7.2 in.) Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut Liquid Inlet 1/4 in. VCR female Vapor Outlet 1/2 in. VCR female Compressed Air 4 mm instant tube fitting Wetted Parts SS 316, Kalrez®, PTFE, Nickel Leak Integrity <1 x 10-9 scc/sec Helium Heater Power Requirements 220 VAC, 60 Hz, 3600W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 50 standard L/min Max. Liquid Flow* TEOS equivalent 6,000 g/hr Max. Liquid Flow* DI Water 600 g/hr System Pressure Limit 120 psig Compressed Air 90 to 110 psi Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid and gas type
Description
The 2821 Turbo-Vaporizer™ is our highest liquid flow rate unit.  This model features 3600W of heater power and can be used to deliver flow rates up to 6000g/hr (TEOS or equivalent). Dimensions 417 mm x 140 mm x 183 mm (16.4 in. x 5.5 in. x 7.2 in.) Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut Liquid Inlet 1/4 in. VCR female Vapor Outlet 1/2 in. VCR female Compressed Air 4 mm instant tube fitting Wetted Parts SS 316, Kalrez®, PTFE, Nickel Leak Integrity <1 x 10-9 scc/sec Helium Heater Power Requirements 220 VAC, 60 Hz, 3600W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 50 standard L/min Max. Liquid Flow* TEOS equivalent 6,000 g/hr Max. Liquid Flow* DI Water 600 g/hr System Pressure Limit 120 psig Compressed Air 90 to 110 psi Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid and gas type

Suppliers

Company
Product
Description
Supplier Links
Turbo-Vaporizer 2821 - 2821 - TSI Incorporated
Shoreview, MN, United States
Turbo-Vaporizer 2821
2821
Turbo-Vaporizer 2821 2821
The 2821 Turbo-Vaporizer™ is our highest liquid flow rate unit.  This model features 3600W of heater power and can be used to deliver flow rates up to 6000g/hr (TEOS or equivalent). Dimensions 417 mm x 140 mm x 183 mm (16.4 in. x 5.5 in. x 7.2 in.) Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut Liquid Inlet 1/4 in. VCR female Vapor Outlet 1/2 in. VCR female Compressed Air 4 mm instant tube fitting Wetted Parts SS 316, Kalrez®, PTFE, Nickel Leak Integrity <1 x 10-9 scc/sec Helium Heater Power Requirements 220 VAC, 60 Hz, 3600W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 50 standard L/min Max. Liquid Flow* TEOS equivalent 6,000 g/hr Max. Liquid Flow* DI Water 600 g/hr System Pressure Limit 120 psig Compressed Air 90 to 110 psi Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid and gas type

The 2821 Turbo-Vaporizer™ is our highest liquid flow rate unit.  This model features 3600W of heater power and can be used to deliver flow rates up to 6000g/hr (TEOS or equivalent).

Dimensions

417 mm x 140 mm x 183 mm (16.4 in. x 5.5 in. x 7.2 in.)


Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
Liquid Inlet 1/4 in. VCR female
Vapor Outlet 1/2 in. VCR female
Compressed Air 4 mm instant tube fitting
Wetted Parts SS 316, Kalrez®, PTFE, Nickel
Leak Integrity <1 x 10-9 scc/sec Helium
Heater Power Requirements 220 VAC, 60 Hz, 3600W
Carrier Gas Inert gas recommended
Gas Inlet Pressure Range 0–80 psig inlet pressure
Max. Carrier Gas Flow Rate* N2 50 standard L/min
Max. Liquid Flow* TEOS equivalent 6,000 g/hr
Max. Liquid Flow* DI Water 600 g/hr
System Pressure Limit 120 psig
Compressed Air 90 to 110 psi
Temperature Range 40°C to 200°C
Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction
Temperature Sensor Type K thermocouple

Specifications subject to change without notice
* Liquid and gas flow ranges are affected by liquid and gas type

Supplier's Site

Technical Specifications

  TSI Incorporated
Product Category MEMS Processing Equipment
Product Number 2821
Product Name Turbo-Vaporizer 2821
Process Chemical Vapor Deposition; Physical Vapor Deposition
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