TSI Incorporated Turbo-Vaporizer 2820 2820

The 2820 Turbo-Vaporizer™ is a classic system. This model is a great choice for easy to vaporize precursors, and features wide internal channels to minimize clogging. Dimensions 224 mm x 183 mm x 140 mm (8.8 in. x 7.2 in. x 5.5 in.) Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut Liquid Inlet 1/8 in. VCR female Vapor Outlet 1/2 in. VCR female Wetted Parts SS 316, Viton Leak Integrity <1 x 10-9 scc/sec Helium Heater Power Requirements 120 VAC, 60 Hz, 300W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 20 standard L/min Max. Liquid Flow* TEOS equivalent 600 g/hr Max. Liquid Flow* DI Water 60 g/hr System Pressure Limit 120 psig Temperature Range 40°C to 200°C Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid and gas type