ETEL S.A. Datasheets for Multi-axis Positioning Systems

Multi-axis positioning systems make use of linear, rotary and goniometric stages, slides and drives in various combinations to create standard and custom positioning systems.


Multi-axis Positioning Systems: Learn more

Product Name Notes
XYZT Planar Platform -- METIS ASAI-YGNN-06-0320-0320xx-XYZT Planar Platform This platform, Metis, is a hybrid planar mechanical/air bearing platform dedicated to step and scan applications. It is a 6 axes platform moving in X, Y, Z...
Multi-axis Positioning System -- ZT Box ASME-NNNN-03-0012-0004xx-ZT combined module The ZT box is a module combining two degrees of freedom, in Z and Theta, within one single unit. Two actuations are possible along the Z direction,...
XYT Stacked Platform -- CHARON2 CHARON2 is a new semiconductor-oriented XY stacked system, backward compatible with existing modules and options. CHARON2 design extends CHARON use cases into the space of higher dynamics and larger payloads,...
Active Isolation System -- QuiET The QuiET Active Isolation System is a new module cancelling both stage-born and ground-born vibrations along 6 Degrees Of Freedom (6 DOF), preventing them from perturbating the process taking place...
XY Stacked Platform -- VULCANO XY The VULCANO XY system is a three-piece-design allowing a compact and cost engineered solution, coupled to mechanical bearings and high-end optical encoders. The baseplate of the bottom axes (Y1 &
XYT Stacked Platform -- VULCANO XYT The VULCANO XYT platform is made up of the standard Vulcano XY outfitted with the RTTB rotary module which includes high resolution encoder coupled to an outstanding mechanical bearing. The...
XYZ3TH Stacked Platform -- VULCANO XYZ3TH The VULCANO XYZ3TH platform is made up of the standard Vulcano XY outfitted with the Z3TH combined module. This 4 degrees of freedom module, provides 364° Theta rotation,...
Z3TH Combined Module The Z3TH Combined Module is enlarging the scope of modules that can sit on top of the existing XY platforms. The Z3TH, 4 degrees of freedom module,...