FAULHABER MICROMO Datasheets for Piezoelectric Motors

Piezoelectric motors use a piezoelectric ceramic element to produce ultrasonic vibrations of an appropriate type in a stator structure. The consequent movement can either be rotational or linear depending on the design of the structure.
Piezoelectric Motors: Learn more

Product Name Notes
Piezo LEGS® Linear Caliper 20N - Linear Motors -- LC20 The LC20 motor is intended for motorizing linear stages or goniometer stages. It is miniaturized to such a degree it will fit within the stage block. Manufacturers can with the...
Piezo LEGSĀ® Linear 6N - Linear Motors -- LL06 The LL06 linear motor is intended for a large range of OEM applications with focus on precise positioning. The direct drive principle of Piezo LEGS ensures motion without any mechanical...
Piezo LEGS® Linear 6N - Linear Motors -- LL10 The LL10 linear motor is intended for a large range of OEM applications. Design focus has been for ease of integration. The very high speed dynamics and nanometer resolution makes...
Piezo LEGS® Rotary 30 mNm - Rotary Motors -- LR17 The LR17 is a high precision motor in the second generation of Piezo LEGS Rotary. It is intended for a large range of applications where high speed dynamics and positioning...
Piezo LEGS® Rotary 50 mNm - Rotary Motors -- LR50 The LR50 motor is non-magnetic. It is intended for a large range of applications where there is demand for non-magnetic material in motor. The very high speed dynamics and micro...
Piezo LEGS® Rotary 80 mNm - Rotary Motors -- LR80 The LR80 motor is intended for a large range of applications. Very high speed dynamics and microradian precision makes it ideal for numerous applications. High torque output in a small...
Piezo LEGS® Linear Twin 20N - Linear Motors -- LT20 The LT20 linear motor is intended for a large range of OEM applications. Design focus has been for ease of integration. The very high speed dynamics and nanometer resolution makes...
Piezo LEGS® Linear Twin 40N - Linear Motors -- LT40 The LT40 linear motor is intended for a large range of OEM applications. Design focus has been for ease of integration. The very high speed dynamics and nanometer resolution makes...
Piezo LEGS® Linear Twin-C 20N - Linear Motors -- LTC20 The LTC20 enclosed linear motor is intended for use in a large range of applications; laser and optics applications, moving mirror mounts, replacement for micrometer screws etc. The very high...
Piezo LEGS® Linear Twin-C 300N - Linear Motors -- LTC300 The LTC300 motor is intended for high force and precision applications. This includes applications in vacuum for the semiconductor industry. The advantage of using the Piezo LEGS technology is the...
Piezo LEGS® Linear Twin-C 40N - Linear Motors -- LTC40 The LTC40 linear motor is intended for use in a large range of applications; laser and optics applications, moving mirror mounts, replacement for micrometer screws etc. The very high speed...
Piezo LEGS® Linear Twin-C 450N - Linear Motors -- LTC450 The LTC450 motor is intended for high force and precision applications. This includes applications in vacuum for the semiconductor industry. The advantage of using the Piezo LEGS technology is the...
Piezo LEGS® Gonio Caliper 20N - Rotary Motors -- LC20
Piezo LEGS® WavePlate - Rotary Motors -- LW20
The Piezo LEGS WavePlate is intended primarily for use in laser applications with standard 0.5 inch (12.7 mm) inserts. The inserts are locked in place with the provided retaining rings.