SynSysCo DD Series Split Dual-Helical Dry Vacuum Pump DD105

DD Series Pumps Excellent Performance in Aggressive, High Demand, High Flow Applications DD Series Pumps are application proven on all Semiconductor processes. The DD255 series is well suited for all FPD, 300mm, and 200mm applications by supporting high particulate loads, aggressive chemistries, and high process gas flows. All DD series pumps can be combined with VFD Driven Mechanical Boosters for higher pumping speeds, lower vacuum pressures, and energy management benefits. The DD105 Series, based on the same fundamental design as the DD255 Series, provides the same excellent performance for 200mm and 150mm applications. Recommended Applications: Crystal Pulling, Lamination, PECVD anti-reflective coating deposition, CdTe and CIGS processes Pumping Capacities: 105 m³/hr to 3,555 m³/hr (70-2,148 cfm)