MF5000 series mass flow meters are specially designed for small pipe flow monitor and control. This series can measure gas flow in a pipe diameter as small as 0.5 mm, but not over 19 mm. Thanks to the self-flow conditioning feature of the MEMS sensors, the meters features an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in this application scope. The accuracy of the meters are generally (1.5+0.2FS%) or better depending on the requests. The meters can work at an environment of -20 to 60°C and pressure up to 2.5 MPa. Applications include semiconductor gas process monitor and control, hospital oxygen gas monitor, etc.
| Siargo Ltd. | |
|---|---|
| Product Category | Flow Meters |
| Product Number | MF5003 |
| Product Name | MF-5000 Series Gas Flow Meter |
| Meter Technology | MEMS Flow Sensor |
| Meter Type | Mass Flow Meter |
| Operating Temperature | -4 to 149 F (-20 to 65 C) |
| Pipe Diameter | 0.12 inch (3 mm) |
| Mounting | In-line |
