Edwards iH and iL system dry pumps are designed specifically for difficult semiconductor processes that produce unwanted by-products or corrosion. The Edwards iL model is an economy version which cannot tolerate as much process contamination. We also offer repair service.
Gas Module: controls nitrogen purges and monitors exhaust pressure.
Dry Pump Control Module: controls the gas module, interprets signals from thermocouples and other sensors, and activates warning and alarms when necessary.
Electrics Module: used for low voltage power requirements.
Dry Pump Display Terminal: hand-held module (game boy) normally kept above the electronics enclosure which allows simple local monitoring and control.
Edwards iH and iL system dry pumps are designed specifically for difficult semiconductor processes that produce unwanted by-products or corrosion. The Edwards iL model is an economy version which cannot tolerate as much process contamination. We also offer repair service.
- Gas Module: controls nitrogen purges and monitors exhaust pressure.
- Dry Pump Control Module: controls the gas module, interprets signals from thermocouples and other sensors, and activates warning and alarms when necessary.
- Electrics Module: used for low voltage power requirements.
- Dry Pump Display Terminal: hand-held module (game boy) normally kept above the electronics enclosure which allows simple local monitoring and control.
