Ask for current price. The Brooks FabExpress (FX3000) is a atmospheric bridge system designed to simultaneously handle 200mm and 300mm wafers. The FX3000 is optimized with the Brooks Reliance robotics automation component set (robot and aligner) and the Brooks family of Load Port Modules qualified by 300mm fabs. We have two FX3000s in stock.
PTB Sales, Inc. | |
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Product Category | Thin Film Equipment |
Product Number | FX3000 |
Product Name | Brooks, Genmark, Kensington, Yaskawa Robots |