For scanning and positioning in X, Y, Z, θX, θY, θZ
800 µm × 800 µm × 200 µm linear range
Up to 1 mrad rotational angle
Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
Direct metrology with capacitive sensors for highest linearity
Outstanding lifetime due to PICMA® piezo actuators
Frictionless, high-precision flexure guiding system
Active trajectory control in all 6 degrees of freedom
For scanning and positioning in X, Y, Z, θX, θY, θZ
