PI (Physik Instrumente) L.P.
6-Axis Precision Piezo Stage
P-587
PI (Physik Instrumente) L.P.
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6-Axis Precision Piezo Stage
P-587
For scanning and positioning in X, Y, Z, θX, θY, θZ
800 µm × 800 µm × 200 µm linear range
Up to 1 mrad rotational angle
Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
Direct metrology with capacitive sensors for highest linearity
Outstanding lifetime due to PICMA® piezo actuators
Frictionless, high-precision flexure guiding system
Active trajectory control in all 6 degrees of freedom
For scanning and positioning in X, Y, Z, θX , θY , θZ
800 µm × 800 µm × 200 µm linear range
Up to 1 mrad rotational angle
Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
Direct metrology with capacitive sensors for highest linearity
Outstanding lifetime due to PICMA® piezo actuators
Frictionless, high-precision flexure guiding system
Active trajectory control in all 6 degrees of freedom
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Datasheet
Technical Specifications
Product Category
Linear Slides and Linear Stages
Product Number
P-587
Product Name
6-Axis Precision Piezo Stage
Axis Configuration
X-Y-Z Axes
Stroke or X-Axis Travel
0.0315 inch (0.8000 mm)
Y-Axis Travel
0.0315 inch (0.8000 mm)
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Axis Configuration
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Stroke or X-Axis Travel
0.9843 to 7.87 inch (25 to 200 mm)
Rated Speed
0.3937 in/sec (0.6000 m/min)
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PI (Physik Instrumente) L.P.
Axis Configuration
X-Y Axes
Stroke or X-Axis Travel
0.1969 to 0.9843 inch (5 to 25 mm)
Y-Axis Travel
0.1969 to 0.9843 inch (5 to 25 mm)
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PI (Physik Instrumente) L.P.
Axis Configuration
X-Y-Z Axes
Carriage Load
0.5511 lbs (0.2500 kg)
Bearing Type
Air Bearing
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Axis Configuration
X-Y Axes; X-Y-Z Axes
Stroke or X-Axis Travel
11.81 inch (300 mm)
Y-Axis Travel
19.69 inch (500 mm)
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