Newport MKS Piezo Steering Mirror Mount, 2 mrad x 2 mrad x 16 µm, with strain gauge sensors PSM2SG

The PSM2SG Piezo Steering Mirror Mount with Strain Gauge provides high-speed, sub-microradian resolution, tip, tilt, and z motion for mirrors, gratings and other optics. Equipped with a direct piezo actuation system without lever arm transmission, the PSM2SG is ideally suited for high bandwidth laser beam steering, switching and stabilization, beam scanning, image stabilization, and laser cavity tuning. Fast and reliable motion is supplied by three multi-layer, low-voltage piezo stacks (PZT) in a right triangle configuration. The length of each piezo stack can be controlled individually. Applying a voltage to one stack, results in a tip or tilt. Changing the length of all three stacks simultaneously, results in a linear z-displacement. The tip and tilt are othogonal, with no need for coordinate transformations as required with alternative designs where the piezo stacks are placed in 120 ° intervals. The parallel motion design of the PSM2SG has also the advantage of being fully temperature compensated, i.e. changes in the environmental temperature do not affect the tilting angle. PSM2SG units are also maintenance-free and are not subject to wear. The PSM2SG provides absolute position control, high linearity, and high repeatability based on internal strain-gauge position sensors. The position feedback compensates also for actuator creep. For highest position stability and highest temperature insensitive performance, the sensors are built in a full Wheatstone bridge design. The PSM2SG can be operated in either open or closed-loop control. Use with the 3-axis Nanopositioning Amplifier.