Its excellent plasma resistance is ideal for applications in semiconductor processing equipment, where particle contamination must be avoided. It contributes to productivity improvement due by reducing equipment maintenance requirements.
| Kyocera Corporation | |
|---|---|
| Product Category | Specialty Ceramics |
| Product Name | Yttria |
| Specialty Ceramic Type | Yttria |
| Shape / Form | Custom Shape |
| Applications | Anti-Plasma Materials |
| Thermal Conductivity | 14 W/m-K (8.09 BTU-ft/hr-ft²-F) |
| CTE | 7.2 to 7.6 µm/m-C (4 to 4.22 µin/in-F) |
