An Expanded Performance, High Voltage, Electrostatic Chuck
Our existing ESC product line was recently expanded with voltages up to 15kV
15kV, 1mA
POLARITY REVERSIBLE – on command – for clamp and de-clamp – Enhances throughput and helps prevent residual charge on the chuck.
Operates from 24 V DC machine power
Built-in RS 232
Low stored energy – Built-in current limit safeguard process from surges and arcs
Continuously adjustable controls - fully programmable for maximum flexibility
No outside cooling or airflow required
Stability of 1% or better of output from 0 to full load
Custom Configurations Available
10-15 kV configurations available
Potential Applications
Flat panel manufacturing
Solar panel manufacturing
Wafer manufacturing
An Expanded Performance, High Voltage, Electrostatic Chuck
Our existing ESC product line was recently expanded with voltages up to 15kV
- 15kV, 1mA
- POLARITY REVERSIBLE – on command – for clamp and de-clamp – Enhances throughput and helps prevent residual charge on the chuck.
- Operates from 24 V DC machine power
- Built-in RS 232
- Low stored energy – Built-in current limit safeguard process from surges and arcs
- Continuously adjustable controls - fully programmable for maximum flexibility
- No outside cooling or airflow required
- Stability of 1% or better of output from 0 to full load
Custom Configurations Available
- 10-15 kV configurations available
Potential Applications
- Flat panel manufacturing
- Solar panel manufacturing
- Wafer manufacturing
