Comdel, Inc. ESC Series - Electrostatic Chuck DC Power ESC 3

Selectable Features and Flexible Packaging Options Performance: Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications. Applications: The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer. Features: Reduced risk of permanent charge on chuck through output polarity reversal Low stored energy and built-in current limitations to safeguard from surges and arcs Short circuit and open circuit proof design for enhanced reliability Built-in RF filtering