Imego Triaxial Accelerometer IQ10A

IQA10 is a micromachined three-axis accelerometer. It uses Imego's patented Quad Slanted Beam principle to obtain symmetric sensitivity for all three axes with near-zero cross coupling. Its compact single-chip design completely avoids any risk for axis misalignment and allows for a cost-effective and quality-assured fabrication. The bulk micromachined concept enables measurements at extremely low noise levels allowing these MEMS sensors to be used in demanding geophone applications. The IQA10 can be designed to operate for different ranges and bandwidths, including DC inclination sensing.