HORIBA Instruments, Inc. Reticle/Mask Particle Detection System PR-PD2

Description
The PR-PD2 Particle Detection System enables fine particle detection down to 0.35μm and also boasts a multi-stage sorter plus has a full range of communication functions. High-throughput measurement is possible on all surfaces from basic reticle and mask to glass and pellicle. Enabled to detect particles as small as 0.35 µm Multi-stage sorter Easy operation DMS Provides top and bottom views of surface particles.
  • Reticle/Mask Particle Detection System - PR-PD2 - HORIBA Instruments, Inc.
    HORIBA Instruments, Inc.
Description
The PR-PD2 Particle Detection System enables fine particle detection down to 0.35μm and also boasts a multi-stage sorter plus has a full range of communication functions. High-throughput measurement is possible on all surfaces from basic reticle and mask to glass and pellicle. Enabled to detect particles as small as 0.35 µm Multi-stage sorter Easy operation DMS Provides top and bottom views of surface particles.

Suppliers

Company
Product
Description
Supplier Links
Reticle/Mask Particle Detection System - PR-PD2 - HORIBA Instruments, Inc.
HORIBA Instruments, Inc.
Irvine, CA, United States
Reticle/Mask Particle Detection System
PR-PD2
Reticle/Mask Particle Detection System PR-PD2
The PR-PD2 Particle Detection System enables fine particle detection down to 0.35μm and also boasts a multi-stage sorter plus has a full range of communication functions. High-throughput measurement is possible on all surfaces from basic reticle and mask to glass and pellicle. Enabled to detect particles as small as 0.35 µm Multi-stage sorter Easy operation DMS Provides top and bottom views of surface particles.

The PR-PD2 Particle Detection System enables fine particle detection down to 0.35μm and also boasts a multi-stage sorter plus has a full range of communication functions. High-throughput measurement is possible on all surfaces from basic reticle and mask to glass and pellicle.

  • Enabled to detect particles as small as 0.35 µm
  • Multi-stage sorter
  • Easy operation DMS
  • Provides top and bottom views of surface particles.
Supplier's Site

Technical Specifications

  HORIBA Instruments, Inc.
Product Category Particle Analyzers
Product Number PR-PD2
Product Name Reticle/Mask Particle Detection System
Measurement Type Size
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