The LU Series offers uninterrupted, safe and reliable delivery of the liquid precursor to liquid material baking systems and injection systems. This leads to increased uptime, reduced operator handling and reduced risk of process contamination.
The LU Series includes a function for automatically implementing a remaining liquid purge sequence.
Using the LU Series, product throughput and maintenance efficiency is improved.
Vapor pressure monitoring function (patent pending) that checks the purge efficiency during the mother tank replacement comes as standard
A load cell monitoring the remaining amount of material in the mother tank is available as an option
Compact design, the LU-A1000 series uses an integrated gas system allowing for significant size reduction when compared with conventional fittings
Easy component replacement during routine maintenance
Degasifier module comes as standard reducing the risk of bubbles within the liquid, making it ideal to supply a variety of vaporization systems, including injection and baking type applications
Safety standards: SEMI S2/S8/S14, CE mark
Improved safety: a variety of monitoring devices provides total automatic control. The LU-A1000 series is equipped with an automatic emergency shutdown function that is activated should a system problem occur
Improved operability: operating sequences have been automated to prevent operation errors. Operations can also be easily controlled with a touch panel on the front of the unit.
The LU Series offers uninterrupted, safe and reliable delivery of the liquid precursor to liquid material baking systems and injection systems. This leads to increased uptime, reduced operator handling and reduced risk of process contamination.
The LU Series includes a function for automatically implementing a remaining liquid purge sequence.
Using the LU Series, product throughput and maintenance efficiency is improved.
- Vapor pressure monitoring function (patent pending) that checks the purge efficiency during the mother tank replacement comes as standard
- A load cell monitoring the remaining amount of material in the mother tank is available as an option
- Compact design, the LU-A1000 series uses an integrated gas system allowing for significant size reduction when compared with conventional fittings
- Easy component replacement during routine maintenance
- Degasifier module comes as standard reducing the risk of bubbles within the liquid, making it ideal to supply a variety of vaporization systems, including injection and baking type applications
- Safety standards: SEMI S2/S8/S14, CE mark
- Improved safety: a variety of monitoring devices provides total automatic control. The LU-A1000 series is equipped with an automatic emergency shutdown function that is activated should a system problem occur
- Improved operability: operating sequences have been automated to prevent operation errors. Operations can also be easily controlled with a touch panel on the front of the unit.
