The iSIS 2000 is a redundant CMP blend and dispense system for high volume manufacturing applications that delivers high slurry quality and availability. The MassFusion load cell-based blending system supports advanced processes and ensures process stability through high accuracy and repeatability. MassFusionT blending technology supports blend accuracies up to 0.5% relative error.
| Edwards Vacuum | |
|---|---|
| Product Category | Industrial Mixers |
| Product Number | iSIS 2000 |
| Product Name | Slurry Blending and Distribution System |
| Applications / Industry | Chemical Processing; Semiconductor Manufacturing |
| Features | Programmable |
| Additional Capabilities | Slurry Distribution |
| Display Type | Digital Numerical Display |
