Edwards Vacuum Slurry Blending and Distribution System iSIS 2000

Description
The iSIS 2000 is a redundant CMP blend and dispense system for high volume manufacturing applications that delivers high slurry quality and availability. The MassFusion load cell-based blending system supports advanced processes and ensures process stability through high accuracy and repeatability. MassFusionT blending technology supports blend accuracies up to 0.5% relative error.
  • Slurry Blending and Distribution System - iSIS 2000 - Edwards Vacuum
    Edwards Vacuum
Description
The iSIS 2000 is a redundant CMP blend and dispense system for high volume manufacturing applications that delivers high slurry quality and availability. The MassFusion load cell-based blending system supports advanced processes and ensures process stability through high accuracy and repeatability. MassFusionT blending technology supports blend accuracies up to 0.5% relative error.

Suppliers

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Product
Description
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Slurry Blending and Distribution System - iSIS 2000 - Edwards Vacuum
Edwards Vacuum
Crawley, West Sussex, United Kingdom
Slurry Blending and Distribution System
iSIS 2000
Slurry Blending and Distribution System iSIS 2000
The iSIS 2000 is a redundant CMP blend and dispense system for high volume manufacturing applications that delivers high slurry quality and availability. The MassFusion load cell-based blending system supports advanced processes and ensures process stability through high accuracy and repeatability. MassFusionT blending technology supports blend accuracies up to 0.5% relative error.

The iSIS 2000 is a redundant CMP blend and dispense system for high volume manufacturing applications that delivers high slurry quality and availability. The MassFusion load cell-based blending system supports advanced processes and ensures process stability through high accuracy and repeatability. MassFusionT blending technology supports blend accuracies up to 0.5% relative error.

Supplier's Site

Technical Specifications

  Edwards Vacuum
Product Category Industrial Mixers
Product Number iSIS 2000
Product Name Slurry Blending and Distribution System
Applications / Industry Chemical Processing; Semiconductor Manufacturing
Features Programmable
Additional Capabilities Slurry Distribution
Display Type Digital Numerical Display
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