Edwards Vacuum Slurry Blending and Distribution System iSIS 1100

Description
The iSIS™1100 Slurry Blending and Distribution System is a high accuracy, low to midvolume slurry system that supports mission-critical CMP processes for R&D or small scale manufacturing applications. The system features MassFusion™ Technology that enables up to ±0.1% blend repeatability and precision to control critical process parameters.
  • Slurry Blending and Distribution System - iSIS 1100 - Edwards Vacuum
    Edwards Vacuum
Description
The iSIS™1100 Slurry Blending and Distribution System is a high accuracy, low to midvolume slurry system that supports mission-critical CMP processes for R&D or small scale manufacturing applications. The system features MassFusion™ Technology that enables up to ±0.1% blend repeatability and precision to control critical process parameters.

Suppliers

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Product
Description
Supplier Links
Slurry Blending and Distribution System - iSIS 1100 - Edwards Vacuum
Edwards Vacuum
Crawley, West Sussex, United Kingdom
Slurry Blending and Distribution System
iSIS 1100
Slurry Blending and Distribution System iSIS 1100
The iSIS™1100 Slurry Blending and Distribution System is a high accuracy, low to midvolume slurry system that supports mission-critical CMP processes for R&D or small scale manufacturing applications. The system features MassFusion™ Technology that enables up to ±0.1% blend repeatability and precision to control critical process parameters.

The iSIS™1100 Slurry Blending and Distribution System is a high accuracy, low to midvolume slurry system that supports mission-critical CMP processes for R&D or small scale manufacturing applications. The system features MassFusion™ Technology that enables up to ±0.1% blend repeatability and precision to control critical process parameters.

Supplier's Site

Technical Specifications

  Edwards Vacuum
Product Category Industrial Mixers
Product Number iSIS 1100
Product Name Slurry Blending and Distribution System
Applications / Industry Chemical Processing; Semiconductor Manufacturing
Features Programmable
Additional Capabilities Slurry Distribution
Display Type Digital Numerical Display
User Interface Digital
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