Edwards Vacuum Slurry Blending and Distribution System iSIS 1000

Description
The iSIS™ 1000 Slurry Blending and Distribution System is a high-accuracy, point-of-use slurry system that supports mission-critical CMP processes for R&D and manufacturing applications. The system features MassFusion™ Technology that enables up to ±0.5% blend repeatability and precision to control critical process parameters. The blend recipe is easily changed through the user-friendly color touch screen interface, permitting instant response to process requirements.
  • Slurry Blending and Distribution System - iSIS 1000 - Edwards Vacuum
    Edwards Vacuum
Description
The iSIS™ 1000 Slurry Blending and Distribution System is a high-accuracy, point-of-use slurry system that supports mission-critical CMP processes for R&D and manufacturing applications. The system features MassFusion™ Technology that enables up to ±0.5% blend repeatability and precision to control critical process parameters. The blend recipe is easily changed through the user-friendly color touch screen interface, permitting instant response to process requirements.

Suppliers

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Product
Description
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Slurry Blending and Distribution System - iSIS 1000 - Edwards Vacuum
Edwards Vacuum
Crawley, West Sussex, United Kingdom
Slurry Blending and Distribution System
iSIS 1000
Slurry Blending and Distribution System iSIS 1000
The iSIS™ 1000 Slurry Blending and Distribution System is a high-accuracy, point-of-use slurry system that supports mission-critical CMP processes for R&D and manufacturing applications. The system features MassFusion™ Technology that enables up to ±0.5% blend repeatability and precision to control critical process parameters. The blend recipe is easily changed through the user-friendly color touch screen interface, permitting instant response to process requirements.

The iSIS™ 1000 Slurry Blending and Distribution System is a high-accuracy, point-of-use slurry system that supports mission-critical CMP processes for R&D and manufacturing applications. The system features MassFusion™ Technology that enables up to ±0.5% blend repeatability and precision to control critical process parameters. The blend recipe is easily changed through the user-friendly color touch screen interface, permitting instant response to process requirements.

Supplier's Site

Technical Specifications

  Edwards Vacuum
Product Category Industrial Mixers
Product Number iSIS 1000
Product Name Slurry Blending and Distribution System
Applications / Industry Chemical Processing; Semiconductor Manufacturing
Features Programmable
Additional Capabilities Slurry Distribution
Display Type Digital Numerical Display
User Interface Digital
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