The Compact Series interferometers have a low profile and use small 3-mm beams to accommodate small target mirrors. One, two, and three-axis versions are available.
| Zygo Corporation | |
|---|---|
| Product Category | Interferometers |
| Product Number | 6191-0624-0X |
| Product Name | Compact 3-Axis HSPMI |
| Laser Wavelength | 633 nm (6330 Å) |
