Mass Extraction at vacuum under 0.2 psia (hard vacuum). Leak Detection of 0.1 to 0.2 micron defects. Air measurements from 5 x 7-7 sccs. Intelligent Molecular Flow Sensor - operates mostly in transitional and molecular flow regimes. Outgassing / Premeability application. Calibration of leak devices.
| Advanced Test Concepts, Inc. (ATC, Inc.) | |
|---|---|
| Product Category | Flow Meters |
| Product Number | IMFS |
| Product Name | Flow Measurement Sensor |
| Meter Technology | Laminar Flow |
| Meter Type | Mass Flow Meter |
| Operating Temperature | 50 to 113 F (10 to 45 C) |
| Mounting | In-line |
| End Fittings | Compression |
