SERIES 615 -- BUTTERFLY WITH SEALING FUNCTION
VAT, Inc.
Butterfly with Sealing Function
Series 615
Description
Area of application:
Semiconductors, FPD and industrial processes, particularly CVD systems.
Description:
Downstream pressure control and isolation valve Compact design Fast operation High-performance, integrated controller Low minimum controllable conductance
Nominal inside diameters (ID):
40 (1 1/2") - 100 (4" )
Body material:
Stainless steel
Description
Area of application:
Semiconductors, FPD and industrial processes, particularly CVD systems.
Description:
Downstream pressure control and isolation valve Compact design Fast operation High-performance, integrated controller Low minimum controllable conductance
Nominal inside diameters (ID):
40 (1 1/2") - 100 (4" )
Body material:
Stainless steel
Suppliers
Area of application:
Semiconductors, FPD and industrial processes, particularly CVD systems.
Description:
Downstream pressure control and isolation valve Compact design Fast operation High-performance, integrated controller Low minimum controllable conductance
Nominal inside diameters (ID):
40 (1 1/2") - 100 (4" )
Body material:
Stainless steel
|
Area of application: | Semiconductors, FPD and industrial processes, particularly CVD systems. |
|
Description: | Downstream pressure control and isolation valve Compact design Fast operation High-performance, integrated controller Low minimum controllable conductance |
|
Nominal inside diameters (ID): | 40 (1 1/2") - 100 (4" ) |
|
Body material: | Stainless steel |
Supplier's Site
Technical Specifications
|
Product Category
|
Vacuum Valves |
|
Product Number
|
Series 615 |
|
Product Name
|
Butterfly with Sealing Function |
|
Type
|
Butterfly
|
|
Port OD
|
1.5 to 4 inch (38.1 to 102 mm)
|
|
Vacuum / Pressure Range
|
(UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr)
|
|
Temperature Range
|
248 F (120 C)
|
|
Port Flange & Seal Type
|
ISO flange; ISO-KF (Small Clamped, <2")
|
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