Analysis of the residual gases at base pressure with the gate valve open. Line of sight between analyzer and process chamber.
Analysis of the residual gases at base pressure with the gate valve open. Very compact. Gate valve: see section «A», Mini UHV gate valves Series 010. Bypass valves exchangeable: type NUPRO with seat made of Kel-F (bakeable to 90°C), with manual actuator: type SS-4BKT, with pneumatic actuator, single acting with closing spring (NC): type SS-4BK-1C.
Mini-UHV-gate valves are for many applications. They can be provided with various actuators. The mechanism is free of lubricants.
| VAT, Inc. | VAT, Inc. | VAT, Inc. | |
|---|---|---|---|
| Product Category | Vacuum Valves | Vacuum Valves | Vacuum Valves |
| Product Number | Series 010 | Series 010 | Series 010 |
| Product Name | Gate Valve for Gas Analysis w/ Orifice | Gate Valve for Gas Analysis with Bypass | Mini UHV Gate Valve |
| Type | Gate | Gate | Gate |
| Vacuum / Pressure Range | (UHV, < 10-8 torr) | (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr) | (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr) |
| Port Flange & Seal Type | Elastomeric / O-ring; Metal Seal | Elastomeric / O-ring; Metal Seal | Elastomeric / O-ring; ISO flange; ISO-KF (Small Clamped, <2"); Metal Seal |
| Valve Seat Seal | Elastomeric / O-ring; Metal | Elastomeric / O-ring; Metal | Elastomeric / O-ring; Metal |
| Valve Actuation | Manual; Pneumatic | Manual; Pneumatic | Manual; Pneumatic |
