motion up to 80 µm
high resonant frequency
fine adjustment for linear stages
motion without mechanical play
nanometer precise adjustment of heavy loads
additional mass up to 20 kg
MICI 80 compatible with series 152 micrometer drives from "Mitutoyo" applications:
improvement of resolution of linear stages
quality control
automation
fine adjustment of optical components
microassembly
The MICI 80 series is well suited for improving the positioning accuracy of linear stages.
The MICI is a piezoelectrical actuator which, in combination with a micrometer screw, is mounted onto a linear stage. Preadjustment is done by the measuring screw and the final fine adjustment is made by the MICI element. Typically, the piezo driven system generates forces up to 216 N. The resolution is down to the sub-nm range.
The major advantage of the MICI system is that it can be installed into an existing system easily. Your system can be upgraded to achieve sub-nm resolution. Please make sure that the travel range of the micrometer screw isn´t longer than the travel range of the linear stage.
- motion up to 80 µm
- high resonant frequency
- fine adjustment for linear stages
- motion without mechanical play
- nanometer precise adjustment of heavy loads
- additional mass up to 20 kg
- MICI 80 compatible with series 152 micrometer drives from "Mitutoyo"
applications:
- improvement of resolution of linear stages
- quality control
- automation
- fine adjustment of optical components
- microassembly
The MICI 80 series is well suited for improving the positioning accuracy of linear stages.
The MICI is a piezoelectrical actuator which, in combination with a micrometer screw, is mounted onto a linear stage. Preadjustment is done by the measuring screw and the final fine adjustment is made by the MICI element. Typically, the piezo driven system generates forces up to 216 N. The resolution is down to the sub-nm range.
The major advantage of the MICI system is that it can be installed into an existing system easily. Your system can be upgraded to achieve sub-nm resolution. Please make sure that the travel range of the micrometer screw isn´t longer than the travel range of the linear stage.
