High performance: Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition Efficient: Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling, high hydrogen throughput Compact: Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame
| Pfeiffer Vacuum, Inc. | |
|---|---|
| Product Category | Vacuum Pumps and Vacuum Generators |
| Product Number | COBRA DS 3161 C |
| Product Name | Dry screw vacuum pumps |
| Vacuum Pump Type | Mechanical |
