Robust: Perfectly suited for harsh semiconductor processes, nickel coating for increased corrosion resistance, design options for dealing with by-product generation Reliable: Extended lifetime Efficient: High-efficiency motors, limited use of electric heaters, cost-efficient
| Pfeiffer Vacuum, Inc. | |
|---|---|
| Product Category | Vacuum Pumps and Vacuum Generators |
| Product Number | A 804 XN |
| Product Name | Multi-stage roots vacuum pumps |
| Vacuum Pump Type | Mechanical |
| Configuration | Individual Vacuum Pump |
| Application | Industrial; Semiconductor |
