The A 1804 XN is a multi-stage Roots vacuum pump designed for high-performance vacuum generation in harsh semiconductor processes. It has a nominal pumping speed of 1600 m³/h at 60 Hz and achieves an ultimate pressure of 1.45 × 10⁻² hPa. Power consumption at ultimate pressure is 2.8 kW, with a cooling water flow requirement of 2.5 to 5 l/min. The sound pressure level is less than 69 dB(A). The pump weighs approximately 540 kg and has dimensions of 961 × 388 × 911 mm, with gas inlet and outlet connections of DN 160 and DN 40, respectively. It features nickel coating for corrosion resistance and is built for extended operational lifetime.
Robust: Perfectly suited for harsh semiconductor processes, nickel coating for increased corrosion resistance, design options for dealing with by-product generation Reliable: Extended lifetime Efficient: High-efficiency motors, limited use of electric heaters, cost-efficient
| Pfeiffer Vacuum, Inc. | |
|---|---|
| Product Category | Vacuum Pumps and Vacuum Generators |
| Product Number | A 1804 XN |
| Product Name | Multi-stage roots vacuum pumps |
| Vacuum Pump Type | Mechanical |
| Configuration | Individual Vacuum Pump |
| Application | Industrial; Semiconductor |
