The A-322 is a PIglide HS planar scanner with air bearings, magnetic linear motors, and an absolute BiSS-C encoder for friction-free, high-precision positioning in cleanroom environments. It offers travel ranges up to 500 mm × 1000 mm and load capacities up to 30 kg, with resolution of 1 nm and maximum velocities up to 2 m/s. The system has three performance classes-Base, Plus, and Ultra-with motor and encoder configurations optimized for varying acceleration, accuracy, and load requirements. Compact motion platform sizes range from 250 × 268 mm to 250 × 318 mm. Air bearing operation requires 550 kPa pressure and clean, dry, oil-free air compliant with ISO 8573-1 Class 1. It is compatible with ACS A-81x and A-82x controllers and features long-life ribbon cables with Teflon coating for particle-free operation.
The PIglide HS planar scanner has magnetic linear motors, vacuum preload, and an absolute encoder: Contact- and friction-free motion for the highest accuracy and reliability.
The positioning system was designed to maximize the throughput and ensure the highest precision. Flexible coupling of the bridge axis to the gantry axis allows lateral decoupling without sacrificing the stiffness of the system.
The A-322 is coupled with industry-leading controllers and drive modules from ACS that offer superior servo performance, advanced control algorithms to improve dynamic performance and error compensation, and a wide suite of software development tools.
The A-322 series is a starting point for further adaptations. Critical core components such as linear motors, measuring systems, and air bearing assemblies have already been developed, tested, and have proven their capabilities. Depending on the application and requirements of the customer, a variant of the A-322 series forms the ideal starting point for a tailor-made, ultraprecise solution.
Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.
PIglide positioning systems are ideally suited for many high-precision applications, such as metrology, photonics, and precision scanning as well as in semiconductor or flat panel display manufacturing.
Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.
3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit the drive force to the motion platform directly and without friction. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.
The A-322 has high-quality, long-lasting ribbon cables and pneumatic hoses. Extensive research and development has resulted in an optimized cable management system that enables millions of maintenance-free cycles. Teflon coating ensures low particle formation.
| PI (Physik Instrumente) L.P. | |
|---|---|
| Product Category | Air Bearings |
| Product Number | A-322 XY |
| Product Name | Air Bearing Table |
| Shape | FlatRectangular |
| Materials | Granite Base, Hard coat Aluminum, Nickel-plated steel side rails, Stainless Steel Mounting Hardware |
| Load Capacity | 55.08 lbs (24.98 kg) |
| Design | Metric |
