The IMS5600-DS absolute interferometer is used for distance measurements with maximum precision. The controller offers a special calibration with intelligent evaluation and enables absolute measurements with subnanometer resolution. The interferometer is used for measurement tasks with the highest accuracy requirements, for example in electronics and semiconductor production. For vacuum applications, Micro-Epsilon offers special sensors, cables and feedthrough accessories.
| Micro-Epsilon Group | |
|---|---|
| Product Category | Interferometers |
| Product Number | interferoMETER IMS5600-DS |
| Product Name | Absolute distance measurements with subnanometer resolution |
| Measurement Capability | Displacement / Position; Specialty / Other; Distance |
| Optical Configuration | NIR-SLED interferometer |
| User Interface | Analog Control; Digital |
