The IMS5420IP67-TH absolute interferometer is designed for industrial wafer thickness measurement in challenging environmental conditions such as wafer lapping. The IP67 controller with stainless steel housing provides stable signal quality for inline measurements of silicon wafers and air gaps.
| Micro-Epsilon Group | |
|---|---|
| Product Category | Interferometers |
| Product Number | interferoMETER IMS5420IP67-TH |
| Product Name | High precision inline wafer thickness measurement |
| Measurement Capability | Thickness; Specialty / Other; Wafer thickness |
| Optical Configuration | NIR-SLED interferometer |
| User Interface | Digital |
