Magmotor Technologies, Inc. Integral Suspension And Motor (ISAM) System MagLev

Magmotor's Integral Suspension And Motor (ISAM) system is specifically designed to reduce particle generation and increase reliability for semiconductor manufacturing equipment. ISAM uniquely integrates a motor and magnetic bearing into one low-profile unit. Magmotor's system uses a magnetic field generated from an integral magnetic bearing and motor to support and spin the rotor. The non-contacting rotor floats in the process chamber and is actively controlled by external displacement sensors. The system is capable of indexing and locking in discrete angular positions. All active portions of the system are located outside of the process or vacuum chamber to improve reliability and maintainability. Magmotor offers speed ranges from 20 to 5,000 rpm and can support wafers up to 300 mm in diameter. The large clearances between the rotor and the chamber allow operation over a wide temperature range. Non-contact Magnetic Bearing No mechanical wear No contamination to environment Variable speed and load capability Bi-directional Unlimited life/no maintenance