Agilent Technologies - Vacuum Products HS-16 Diffusion Pump

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HS-16 Diffusion Pump -  - Agilent Technologies - Vacuum Products
Lexington, MA, United States
HS-16 Diffusion Pump
HS-16 Diffusion Pump
The Agilent HS-16 Oil Diffusion Pump is a pump with high throughput and high pumping speed of 6000 L/s. With its fully optimized vapor jet, the robust boiler design and the thermal protection switches the pump will run without any maintenance for many years. It is available with 16 in. ASA or ISO 500K inlet flange. This pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics and protective film layers. Fill and drain assembly allows for easy maintenance of pump fluid Five-stage fractionating jet purifies pumping fluid for cleaner operation Stable and reliable performance under widely varying operation conditions Foreline baffle prevents loss of fluid into backing pump system Fluid-level sight glass provides quick indication of pump fluid status at all times High forepressure tolerance Low ultimate pressure Robust boiler design High throughput with high pumping speed

The Agilent HS-16 Oil Diffusion Pump is a pump with high throughput and high pumping speed of 6000 L/s. With its fully optimized vapor jet, the robust boiler design and the thermal protection switches the pump will run without any maintenance for many years. It is available with 16 in. ASA or ISO 500K inlet flange.
This pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics and protective film layers.

  • Fill and drain assembly allows for easy maintenance of pump fluid
  • Five-stage fractionating jet purifies pumping fluid for cleaner operation
  • Stable and reliable performance under widely varying operation conditions
  • Foreline baffle prevents loss of fluid into backing pump system
  • Fluid-level sight glass provides quick indication of pump fluid status at all times
  • High forepressure tolerance
  • Low ultimate pressure
  • Robust boiler design
  • High throughput with high pumping speed
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Technical Specifications

  Agilent Technologies - Vacuum Products
Product Category High Vacuum Pumps
Product Name HS-16 Diffusion Pump
Configuration Individual Vacuum Pump
Application Industrial; Manufacturing; Semiconductor
Ultimate Vacuum 9.75E-4 to 4.88E-8 torr (29.92 to 29.92 in Hg vac)
Pumping Speed 12713 to 15892 CFM (21621 to 27027 m³/hr)
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