JST's VLF is designed for manual processing of 6" or smaller wafers in a class 1,000 environment. The headcasing houses the electrical controls and is nitrogen purged. The Emergency Power Off (EPO) is located in the headcasing and shuts the power down if exhaust fails. These units have been certified to meet industrial ventilation requirements thru ASHRAE testing.
| JST Manufacturing, Inc. | |
|---|---|
| Product Category | Semiconductor Wet Process Equipment |
| Product Name | Vertical Laminar Flow Workstation (VLF) |
