The CS-100 Series monitors measure in real time the concentrations of various types of chemical solutions and have the capability to control the timing of automatic chemical spiking.
Measurement is fully automatic; no measurement control is required once the measurements have begun. The operator needs only to prepare the chemical solution. In addition, air is used for the reference spectral measurements to be taken without abnormalities in the solution flow.
| HORIBA Instruments, Inc. | |
|---|---|
| Product Category | Semiconductor Wet Process Equipment |
| Product Number | CS-100 Series |
| Product Name | Chemical Concentration Monitor |