JST's Bell Jar Chamber Cleaner utilizes a proven chemical spray process increasing your Reactors up time!
Standard Features
Oscillating Chemical & DI Water Spray Manifods
On Board Chemical Storage Reservoirs with Filtration
Purged Electrical Compartments
Secondary Containment with Leak Detection
Meets All Applicable SEMI Safety Codes
Safety Interlocked Sliding Seal Doors
PLC Recipe Driven Control
Factory Mutual 4910 Listed Materials
Full spray coverage ensures uniform etching and thorough rinsing of the bell jar and process chamber.
JST's Bell Jar Chamber Cleaner utilizes a proven chemical spray process increasing your Reactors up time!
Standard Features
- Oscillating Chemical & DI Water Spray Manifods
- On Board Chemical Storage Reservoirs with Filtration
- Purged Electrical Compartments
- Secondary Containment with Leak Detection
- Meets All Applicable SEMI Safety Codes
- Safety Interlocked Sliding Seal Doors
- PLC Recipe Driven Control
- Factory Mutual 4910 Listed Materials
Full spray coverage ensures uniform etching and thorough rinsing of the bell jar and process chamber.
