Simplify Operations and Reduce Costs Without Sacrificing Performance
Performance: The CDX 1000 dual frequency RF generator comes in a 1200 watt design. The high frequency (HF) section of the CDX provides 600 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section delivers 600 watts, with optional fixed or variable frequencies ranging from 20 kHz to 13.56 MHz. Applications: This solid-state generator is ideal for plasma applications including bias, etch, deposition and ashing in semiconductor processing, as well as solar cell and photovoltaic applications.
Features:
Compact packaging reduces space, service (electrical and plumbing), and spare inventory requirements
Complies to CE-Mark standards and is ETL Marked and SEMI F47 compliant
Protection circuits safeguard the amplifiers from over-voltage, over-current and over-power operating conditions
Gain-control circuitry stabilizes output power against line and load variations, and limits power during high VSWR conditions
Simplify Operations and Reduce Costs Without Sacrificing Performance
Performance:
The CDX 1000 dual frequency RF generator comes in a 1200 watt design. The high frequency (HF) section of the CDX provides 600 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section delivers 600 watts, with optional fixed or variable frequencies ranging from 20 kHz to 13.56 MHz.
Applications:
This solid-state generator is ideal for plasma applications including bias, etch, deposition and ashing in semiconductor processing, as well as solar cell and photovoltaic applications.
Features:
- Compact packaging reduces space, service (electrical and plumbing), and spare inventory requirements
- Complies to CE-Mark standards and is ETL Marked and SEMI F47 compliant
- Protection circuits safeguard the amplifiers from over-voltage, over-current and over-power operating conditions
- Gain-control circuitry stabilizes output power against line and load variations, and limits power during high VSWR conditions
