The HORIBA PR-PD2HR Particle Detection System inherits it's high-performance functions from the reticle/mask particle detection PD series which is proud of its high availability and long-term stability. At the same time also increasing the S/N ratio by more than three times and dramatically improving operating sensitivity.
S/N ratio increased by more than 3x. Dramatically improved operating sensitivity
Advanced reticle measurement
Substantially reduces the initial costs required for inspections. Increases the number of reticles measured, by dramatically reducing inspection times.
The HORIBA PR-PD2HR Particle Detection System inherits it's high-performance functions from the reticle/mask particle detection PD series which is proud of its high availability and long-term stability. At the same time also increasing the S/N ratio by more than three times and dramatically improving operating sensitivity.
- S/N ratio increased by more than 3x. Dramatically improved operating sensitivity
- Advanced reticle measurement
- Substantially reduces the initial costs required for inspections. Increases the number of reticles measured, by dramatically reducing inspection times.
