HORIBA's best-selling baking system has been developed to meet the requirements of today’s high technology industries. Without the need of a carrier gas, the system can provide stable vaporization of materials such as TEOS (at a rate of 600 SCCM) and H2O (at a rate of 2 SLM). For ease of access all device maintenance can be performed from the front of the unit.
High Flow Rate Gasification
The LSC-A100 provides stable gasification of materials such as TEOS 600SCCM and H2O 2SLM
All device maintenance can be performed at the front of the unit
An optional PocketPC type PDA can be used to monitor the operating conditions of the LSC and to record and analyze operation logs.
HORIBA's best-selling baking system has been developed to meet the requirements of today’s high technology industries. Without the need of a carrier gas, the system can provide stable vaporization of materials such as TEOS (at a rate of 600 SCCM) and H2O (at a rate of 2 SLM). For ease of access all device maintenance can be performed from the front of the unit.
- High Flow Rate Gasification
- The LSC-A100 provides stable gasification of materials such as TEOS 600SCCM and H2O 2SLM
- All device maintenance can be performed at the front of the unit
- An optional PocketPC type PDA can be used to monitor the operating conditions of the LSC and to record and analyze operation logs.
