TSI Incorporated Turbo-Vaporizer 2840PE 2840PE

The 2840PE Turbo-Vaporizer™ is one of our smallest vaporizers and has the state-of-the art PE atomizer with on-board flow control.  This model has been optimized for low flow applications; featuring an ultra-fast response time making it a great choice for ALD applications. Dimensions 290 mm x 84 mm x 109 mm (11.4 in. x 3.3 in. x 4.3 in.) Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut Liquid Inlet 1/8 in. VCR female Vapor Outlet 1/4 in. VCR female Compressed Air 4 mm instant tube fitting Wetted Parts SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy® Leak Integrity <1 x 10-9 scc/sec Helium Heater Power Requirements 110 VAC, 60 Hz, 300W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max Carrier Gas Flow* N2 15 standard L/min Max. Liquid Flow* TEOS equivalent 300 g/hr Max. Liquid Flow* DI Water 30 g/hr System Pressure Limit 120 psig Compressed Air 90 to 110 psi Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid and gas type