The newly designed BCD-2800 provides an upgrade and improvement option for customers processing requirements formerly filled by our VES-2550 load lock evaporation system. This mid-sized system offers tooling options that support either lift off or conformal (step coverage) processes, with lift off tolling enabling the customer to process up to twenty-five 4 inch wafers in a single processing cycle. The BCD-2800 features a box type product chamber mounted over a BJD-2000 source body and replaces the VES-2550 in our product line. This system features high throughput 16 inch cryogenic pumps mounted on the product chamber.
| Edwards Vacuum | |
|---|---|
| Product Category | Thin Film Equipment |
| Product Number | BCD-2800 |
| Product Name | Temescal |
| Type | Batch |
| Process | Physical Vapor Deposition; Electron Beam Evaporation |
| Applications | Research / Surface Analysis |
| Materials Processed | Metal |
