TSI Incorporated Turbo-Vaporizer 2800 2800

Description
The 2800 Turbo-Vaporizer™ can be operated at temperatures up to 300ºC, making it a great commercial solution for high temperature applications.   This classic system is a great choice for stable long-run processes. Dimensions 300 mm x 203 mm x 203 mm (12 in. x 8 in. x 8 in.) Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut Liquid Inlet 1/8 in. VCR female Vapor Outlet 1/2 in. VCR female Wetted Parts SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy® Leak Integrity <1 x 10-9 scc/sec Helium Heater Power Requirements 120 VAC, 60 Hz, 300W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 15 standard L/min Max. Liquid Flow* TEOS equivalent 900 g/hr Max. Liquid Flow* DI Water 90 g/hr System Pressure Limit 120 psig Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid and gas type
Description
The 2800 Turbo-Vaporizer™ can be operated at temperatures up to 300ºC, making it a great commercial solution for high temperature applications.   This classic system is a great choice for stable long-run processes. Dimensions 300 mm x 203 mm x 203 mm (12 in. x 8 in. x 8 in.) Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut Liquid Inlet 1/8 in. VCR female Vapor Outlet 1/2 in. VCR female Wetted Parts SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy® Leak Integrity <1 x 10-9 scc/sec Helium Heater Power Requirements 120 VAC, 60 Hz, 300W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 15 standard L/min Max. Liquid Flow* TEOS equivalent 900 g/hr Max. Liquid Flow* DI Water 90 g/hr System Pressure Limit 120 psig Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid and gas type

Suppliers

Company
Product
Description
Supplier Links
Turbo-Vaporizer 2800 - 2800 - TSI Incorporated
Shoreview, MN, United States
Turbo-Vaporizer 2800
2800
Turbo-Vaporizer 2800 2800
The 2800 Turbo-Vaporizer™ can be operated at temperatures up to 300ºC, making it a great commercial solution for high temperature applications.   This classic system is a great choice for stable long-run processes. Dimensions 300 mm x 203 mm x 203 mm (12 in. x 8 in. x 8 in.) Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut Liquid Inlet 1/8 in. VCR female Vapor Outlet 1/2 in. VCR female Wetted Parts SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy® Leak Integrity <1 x 10-9 scc/sec Helium Heater Power Requirements 120 VAC, 60 Hz, 300W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 15 standard L/min Max. Liquid Flow* TEOS equivalent 900 g/hr Max. Liquid Flow* DI Water 90 g/hr System Pressure Limit 120 psig Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid and gas type

The 2800 Turbo-Vaporizer™ can be operated at temperatures up to 300ºC, making it a great commercial solution for high temperature applications.   This classic system is a great choice for stable long-run processes.

Dimensions 300 mm x 203 mm x 203 mm (12 in. x 8 in. x 8 in.)
Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
Liquid Inlet 1/8 in. VCR female
Vapor Outlet 1/2 in. VCR female
Wetted Parts SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy®
Leak Integrity <1 x 10-9 scc/sec Helium
Heater Power Requirements 120 VAC, 60 Hz, 300W
Carrier Gas Inert gas recommended
Gas Inlet Pressure Range 0–80 psig inlet pressure
Max. Carrier Gas Flow Rate* N2 15 standard L/min
Max. Liquid Flow* TEOS equivalent 900 g/hr
Max. Liquid Flow* DI Water 90 g/hr
System Pressure Limit 120 psig
Temperature Range 40°C to 200°C
Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction
Temperature Sensor Type K thermocouple

Specifications subject to change without notice
* Liquid and gas flow ranges are affected by liquid and gas type

Supplier's Site

Technical Specifications

  TSI Incorporated
Product Category MEMS Processing Equipment
Product Number 2800
Product Name Turbo-Vaporizer 2800
Process Chemical Vapor Deposition; Physical Vapor Deposition
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