Suntech Applied Materials (Hefei) Co.,Ltd Datasheets for Wafer Chucks

Wafer chucks are used to handle semiconductor wafers during wafer processing applications. Common work clamping technologies include vacuum and electrostatic.
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Product Name Notes
Material High-purity aluminum oxide (Al₂O₃), silicon carbide (SiC), or silicon nitride (Si₃N₄). Advanced porous ceramic structure for uniform vacuum distribution. Features The porosity is high: An important feature of porous...