LOT Vacuum America Datasheets for Mechanical Vacuum Pumps and Systems
Mechanical vacuum pumps and systems contain devices such as pistons, claws, scrolling spirals, and diaphragms to isolate and compress air.
Mechanical Vacuum Pumps and Systems: Learn more
| Product Name | Notes |
|---|---|
| DD Series Pumps are application proven on all Semiconductor processes. The DD255 series is well suited for all FPD, 450mm, 300mm, and 200mm applications by supporting high particulate loads, aggressive... | |
| HD Series Pumps are application proven pumps providing world class energy efficiency, low CoO, and excellent reliability. HD series are a good selection for PECVD and LPCD applications involving corrosive,... | |
| LD Series pumps are designed to sip electricity and back turbo pumps. LD pumps are an excellent choice for entry and exit load locks, PVD Turbos, evaporation chambers, and transfer... | |
| The GD Series builds upon the proven Dura-Dry dual screw design introduced by LOT Vacuum in 2002 and provides world class conservation of operating resources. The GD Series is well... | |
| The GHD Series provides large capacity dry pumps for Industrial, and large scale LCD and Solar applications. Custom GHD configurations provide single stage pumping capacity up to 2,200 M3/Hr and... |