LOT Vacuum America Datasheets for Vacuum Pumps and Vacuum Generators
Vacuum pumps and vacuum generators provide sub-atmospheric pressure for a variety of industrial and scientific applications where a vacuum is required.
Vacuum Pumps and Vacuum Generators: Learn more
| Product Name | Notes |
|---|---|
| DD Series Pumps are application proven on all Semiconductor processes. The DD255 series is well suited for all FPD, 450mm, 300mm, and 200mm applications by supporting high particulate loads, aggressive... | |
| HD Series Pumps are application proven pumps providing world class energy efficiency, low CoO, and excellent reliability. HD series are a good selection for PECVD and LPCD applications involving corrosive,... | |
| LD Series pumps are designed to sip electricity and back turbo pumps. LD pumps are an excellent choice for entry and exit load locks, PVD Turbos, evaporation chambers, and transfer... | |
| The GD Series builds upon the proven Dura-Dry dual screw design introduced by LOT Vacuum in 2002 and provides world class conservation of operating resources. The GD Series is well... | |
| The GHD Series provides large capacity dry pumps for Industrial, and large scale LCD and Solar applications. Custom GHD configurations provide single stage pumping capacity up to 2,200 M3/Hr and... |