LD Series Pumps
World Class Energy Efficiency for Light Duty Applications
LD Series pumps are designed to sip electricity and back turbo pumps. LD pumps are an excellent choice for entry and exit load locks, PVD Turbos, evaporation chambers, and transfer chambers. LD Pumps incorporate the same state-of-the-art energy and communication features as the HD series.
| SynSysCo | |
|---|---|
| Product Category | Vacuum Pumps and Vacuum Generators |
| Product Number | LD1000 |
| Product Name | LD Series Clean to Light Duty Service Dry Pump |
| Vacuum Pump Type | Mechanical |
| Configuration | Individual Vacuum Pump |
| Application | Industrial; Semiconductor; Load Lock, General Vacuum, PVD, Preclean, Transfer, Metrology & Inspection, Etch, Implant |
| Pumping Speed | 530 CFM (901 m³/hr) |
| Ultimate Vacuum | 5.00E-4 torr (29.9 in Hg vac) |
