Proceedings of SPIE Volume 8975
Editor(s): Herbert R. Shea ; Rajeshuni Ramesham
Date Published: 19 March 2014
| SPIE | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | ISBN: 9780819498885 |
| Product Name | Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII |