Proceedings of SPIE Volume 6466
Editor(s): David L. Dickensheets ; Bishnu P. Gogoi ; Harald Schenk
Date Published: 20 January 2007
| SPIE | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | ISBN: 9780819465795 |
| Product Name | MOEMS and Miniaturized Systems VI |