• Precise temperature control
• Compact, rack-mount chiller
• Lowest cost of ownership
• Improved wafer to wafer repeatability
• Reduced energy costs
• Increased MTBF
• Saved fab space
• Reduced repair costs
• Eliminated Freons and their replacement chemicals
• Can operate in heating or cooling modes
• Programmed for Lam Research analog and (single channel, single channel dual output or dual output Master/Slave) Applied Materials CHX plasma etcher interfaces
| Solid State Cooling Systems | |
|---|---|
| Product Category | Chillers (industrial) |
| Product Number | 1200 |
| Product Name | ThermoRack |
| Application | Industrial; Scientific |
| Power Source | 230/50/1; 208-230/60/1; Other; 200-240 VAC 1 phase 7 amps 50/60 Hz |
| FLA | 7 amps |
| Condenser Cooling | Water-Cooled |
| Control Panel Features | Local; TempGauge |
